![\"\u7528\u767d\u5e03\u64e6\u62ed\u6cd5\u68c0\u67e5\u771f\u7a7a\u8154\u4f53\u5185\u8868\u9762\u9897\u7c92\u4e0e\u6b8b\u7559\"](\"https:\/\/panovacuum.cn\/blog\/wp-content\/uploads\/2026\/11\/inspection-cleanliness-white-cloth-wipe-1200w.webp\")
3. \u70d8\u70e4\u6e29\u5ea6\u6309\u6750\u6599\u5b9a<\/h2>\n
\u94dc\u3001\u94dd 150\u2013200 \u2103 \u00d7 24 h \u5373\u591f\uff0c\u6c22\u51fa\u6c14\u7387\u964d\u5230 <10\u207b\u00b9\u00b3\uff1b\u4e0d\u9508\u94a2\u8981 >200 \u2103 \u751a\u81f3 300 \u2103\uff0c\u51e0\u6beb\u7c73\u539a\u94a2\u8154\u9700\u53cd\u590d\u591a\u6b21\u70d8\u70e4\uff1b\u5728\u4f4d\u70d8\u70e4\u5bf9\u91d1\u5c5e >120 \u2103\u3001\u226512 h \u6709\u6548\uff0c\u5e38\u89c4 150\u2013250 \u2103 \u00d7 24 h\uff0c\u4e3b\u8981\u53bb\u5904\u662f\u6c34\u6c7d\uff1bViton \u4e0a\u9650\u7ea6 200 \u2103\uff0c\u8d85\u6e29\u4f1a\u6c38\u4e45\u53d8\u5f62\u6216\u5206\u89e3\uff0c\u53cd\u800c\u53d8\u6210\u6c61\u67d3\u6e90\u3002\u8fd9\u5c31\u662f\u94dd\u8154\u4f53\u597d\u70d8\u3001\u94a2\u8154\u4f53\u96be\u70d8\u7684\u539f\u56e0\u3002<\/p>\n
4. \u70d8\u70e4\u7ed3\u675f\u7684\u4e09\u6761\u5224\u636e<\/h2>\n
\u538b\u529b\u5728\u8bbe\u5b9a\u6e29\u5ea6\u4e0b\u4e0d\u518d\u4e0b\u964d\uff1b\u964d\u6e29\u540e\u538b\u529b\u56de\u843d\u5230\u76ee\u6807\u503c\uff1b\u6b8b\u4f59\u6c14\u4f53\u8c31\u91cc 18\uff08H\u2082O\uff09\u5cf0\u964d\u5230 28\uff08CO\/N\u2082\uff09\u5cf0\u4ee5\u4e0b\u3002\u524d\u4e24\u6761\u770b\u8868\uff0c\u7b2c\u4e09\u6761\u5fc5\u987b\u4e0a RGA\u3002\u6ca1\u6709 RGA \u5c31\u8bf4\u70d8\u597d\u4e86\uff0c\u662f\u731c\u3002<\/p>\n
5. \u6e05\u6d17\u662f\u4e09\u5c42\uff0c\u4e0d\u662f\u4e00\u6b21\u64e6<\/h2>\n
\u2460 \u53bb\u6cb9\u8102\u3001\u6307\u7eb9\u3001\u677e\u6563\u9897\u7c92\uff1a\u6eb6\u5242\u3001\u78b1\u6027\u6d17\u6da4\u5242\u3001\u8d85\u58f0\uff1b\u2461 \u53bb\u6c27\u5316\u5c42\u4e0e\u6c61\u67d3\u819c\uff1a\u9178\u6d17\u3001\u7535\u629b\u6216\u5316\u5b66\u629b\u5149\uff1b\u2462 \u53bb\u635f\u4f24\u5c42\uff1a\u9700\u4e13\u95e8\u5de5\u827a\uff08\u771f\u7a7a\u9000\u706b\u3001\u79bb\u5b50\u8f70\u51fb\uff09\u3002\u53ea\u505a\u2460\u4e0d\u505a\u2462\u662f\u56fd\u4ea7\u8154\u4f53\u6700\u5e38\u89c1\u7684\u77ed\u677f\uff1a\u8868\u9762\u770b\u7740\u5e72\u51c0\uff0c\u635f\u4f24\u5c42\u91cc\u7684\u6c22\u548c\u6742\u8d28\u5728\u62bd\u771f\u7a7a\u540e\u6162\u6162\u91ca\u653e\uff0c\u538b\u529b\u5361\u5728 10\u207b\u2077 \u91cf\u7ea7\u4e0a\u4e0d\u53bb\uff0c\u70d8\u70e4\u4e5f\u6551\u4e0d\u56de\u6765\u3002\u4e00\u6b21\u88f8\u624b\u63a5\u89e6\u7684\u6307\u7eb9\uff0c\u5176\u51fa\u6c14\u91cf\u53ef\u4ee5\u62b5\u6d88\u51e0\u5c0f\u65f6\u70d8\u70e4\u3002<\/p>\n
6. \u4e00\u4e2a O-ring \u503c\u4e24\u4e2a\u6570\u91cf\u7ea7<\/h2>\n
\u70d8\u70e4\u8fc7\u7684\u5168\u91d1\u5c5e\u7cfb\u7edf\uff0c\u5206\u5b50\u6cf5\u6781\u9650\u538b\u529b 10\u207b\u00b9\u2070\u201310\u207b\u00b9\u00b9 mbar\uff1b\u53ea\u8981\u6709\u4e00\u5904\u5f39\u6027\u4f53\u5bc6\u5c01\uff0c\u6781\u9650\u5c31\u6389\u5230 10\u207b\u2078 \u91cf\u7ea7\u3002\u8fd9\u5c31\u662f\u8d85\u9ad8\u771f\u7a7a\u5fc5\u987b\u5168\u91d1\u5c5e\u3001CF \u5200\u53e3\u7684\u5b9a\u91cf\u4f9d\u636e\u3002<\/p>\n
7. \u9897\u7c92\u95e8\u69db\u5148\u770b\u662f\u54ea\u4e00\u5e74\u7684\u6570<\/h2>\n
ITRS 2003\uff08FEP Table 70a\uff09\uff1a\u5173\u952e\u9897\u7c92\u76f4\u5f84 2003 \u5e74 50 nm \/ 59 \u9897\u6bcf\u7247\u30012005 \u5e74 40 nm \/ 97 \u9897\u30012007 \u5e74 32.5 nm \/ 80 \u9897\u30012009 \u5e74 25 nm \/ 68 \u9897\uff1b\u5173\u952e GOI \u8868\u9762\u91d1\u5c5e \u22640.5\u00d710\u00b9\u2070 atoms\/cm\u00b2\uff0c\u5176\u4ed6\u5173\u952e\u8868\u9762\u91d1\u5c5e \u22641\u00d710\u00b9\u2070\uff0c\u8868\u9762\u78b3 1.8\u00d710\u00b9\u00b3\uff0c\u53ef\u52a8\u79bb\u5b50 1.8\u00d710\u00b9\u2070\u3002\u8fd9\u662f 2003 \u7248\u8def\u7ebf\u56fe\uff0c\u5f53\u4ee3\u66f4\u4e25\uff0c\u4ef7\u503c\u5728\u5355\u4f4d\u3001\u91cf\u7ea7\u548c\u5b9a\u4e49\u5f62\u5f0f\uff0c\u4e0d\u80fd\u5f53\u73b0\u884c\u6807\u51c6\u5f15\u7528\u3002<\/p>\n
8. \u53cd\u76f4\u89c9\uff1a\u4f20\u7247\u673a\u6784\u6bd4\u8154\u4f53\u66f4\u810f<\/h2>\n
ITRS 2003 Table 109a\uff08defects\/m\u00b2\uff0c54 nm \u6298\u7b97\uff09\uff1aPlasma etch 1049\u3001CVD insulator 854\u3001Metal PVD 591\u3001Wet bench 474\u3001CMP clean 397\uff0c\u800c wafer handling \u53ea\u6709 33\uff0c\u5230 2009 \u5e74\u964d\u5230 6\u3002\u673a\u5668\u4eba\u3001\u5347\u964d\u9500\u3001\u95e8\u9600\u6bd4\u8154\u4f53\u672c\u8eab\u66f4\u5bb9\u6613\u5e26\u8fdb\u9897\u7c92\u2014\u2014\u9897\u7c92\u63a7\u5236\u53ea\u76ef\u5185\u58c1\uff0c\u65b9\u5411\u5c31\u9519\u4e86\u3002<\/p>\n
9. 4 \u00c5 \u548c Ra 0.1 \u00b5m \u4e0d\u662f\u4e00\u56de\u4e8b<\/h2>\n
ITRS \u8981\u6c42\u6676\u5706\u8868\u9762 LVGX RMS 4 \u00c5\uff08\u22480.4 nm\uff09\uff1b\u56fd\u4ea7\u7535\u629b\u5e38\u89c1 Ra 0.1\u20130.2 \u00b5m\uff08\u884c\u4e1a\u7ecf\u9a8c\u503c\uff09\u3002\u4e24\u8005\u5dee\u4e24\u4e2a\u6570\u91cf\u7ea7\uff0c\u5b9a\u4e49\u4e5f\u4e0d\u540c\uff08RMS vs Ra\uff09\u3002\u522b\u628a\u7535\u629b Ra \u76f4\u63a5\u5bf9\u6807\u6676\u5706\u7ea7\u8981\u6c42\uff0c\u4e5f\u522b\u56e0\u5185\u58c1 Ra \u9ad8\u5c31\u65ad\u8a00\u9897\u7c92\u8d85\u6807\u2014\u2014\u4e2d\u95f4\u8fd8\u9694\u7740\u6c14\u6d41\u3001\u6d41\u573a\u4e0e\u4f20\u7247\u673a\u6784\u3002<\/p>\n
10. \u53ef\u4ee5\u7167\u7740\u505a\u7684\u56db\u6761\u7eaa\u5f8b<\/h2>\n
\u6d17\u5e72\u51c0\u7acb\u5373\u62bd\u771f\u7a7a\uff0c\u4e0d\u5728\u8f66\u95f4\u8fc7\u591c\uff1b\u70d8\u70e4\u6309\u6750\u6599\u5b9a\u6e29\u5ea6\uff0c\u522b\u8ba9 Viton \u8d85\u8fc7 200 \u2103\uff1b\u70d8\u70e4\u7ed3\u675f\u770b\u4e09\u6761\u5224\u636e\uff0c\u5176\u4e2d\u4e00\u6761\u5fc5\u987b\u662f RGA \u7684 18\/28 \u5cf0\u5bf9\u6bd4\uff1b\u9700\u8981\u65f6\u52a0\u8f89\u5149\u653e\u7535\u6e05\u6d17\u53bb\u8868\u9762\u6b8b\u7559\u6c61\u67d3\u7269\u3002\u6e05\u6d01\u4e0d\u662f\u52a8\u4f5c\uff0c\u662f\u5e26\u5224\u636e\u7684\u6d41\u7a0b\uff1b\u52a8\u4f5c\u505a\u5b8c\u6ca1\u6709\u5224\u636e\uff0c\u7b49\u4e8e\u6ca1\u505a\u3002<\/p>\n
\u51fa\u6c14\u4e0e\u9897\u7c92\u662f\u4e24\u4ef6\u4e8b\uff1a\u51fa\u6c14\u770b\u8868\u9762\u5316\u5b66\uff0c\u9897\u7c92\u770b\u6d41\u573a\u4e0e\u8fd0\u52a8\u90e8\u4ef6\u3002\u4e24\u4ef6\u4e8b\u90fd\u8981\u5224\u636e\uff0c\u5224\u636e\u90fd\u8981\u80fd\u590d\u73b0\u3002<\/p>\n
\u5e38\u89c1\u95ee\u9898<\/h2>\n\u8154\u4f53\u6d17\u5b8c\u8fd8\u662f\u62bd\u4e0d\u4e0b\u53bb\uff0c\u5148\u67e5\u4ec0\u4e48\uff1f<\/h3>\n
\u5148\u533a\u5206\u51fa\u6c14\u4e0e\u6f0f\u3002\u6c34\u6c7d\u51fa\u6c14\u7387\u6309 3\u00d710\u207b\u2079\/t\uff08\u5c0f\u65f6\uff09\u8870\u51cf\uff0c\u6e05\u6d17\u540e\u8868\u9762\u6c34\u5c42\u82e5\u5df2\u91cd\u65b0\u5438\u9971\uff0c\u4e4b\u524d\u62bd\u7684\u65f6\u95f4\u5c31\u767d\u8d39\u4e86\u3002<\/p>\n
\u70d8\u70e4\u80fd\u89e3\u51b3\u591a\u5c11\u95ee\u9898\uff1f<\/h3>\n
250 \u2103 \u00d7 24 h \u53ef\u628a\u6c34\u6c7d\u538b 4 \u4e2a\u6570\u91cf\u7ea7\uff082\u00d710\u207b\u00b9\u2070 \u2192 1\u00d710\u207b\u00b9\u2074\uff09\uff0c\u4f46\u6c22\u53ea\u538b 1 \u4e2a\u6570\u91cf\u7ea7\uff0c\u6c22\u8981\u9760\u771f\u7a7a\u9000\u706b\u6216\u957f\u65f6\u95f4\u62bd\u6c14\u3002<\/p>\n
\u9897\u7c92\u8981\u6c42\u600e\u4e48\u6362\u7b97\u5230\u6bcf\u7247\u6676\u5706\uff1f<\/h3>\n
\u7528\u5173\u952e\u9897\u7c92\u76f4\u5f84\u4e0e\u5141\u8bb8\u7f3a\u9677\u6570\u6298\u7b97\uff1aITRS 2003 \u7ed9\u51fa\u7684\u91cf\u7ea7\u662f 25\u201350 nm \u5bf9\u5e94 59\u201397 \u9897\/\u7247\uff0c\u73b0\u884c\u95e8\u69db\u66f4\u4e25\uff0c\u4ee5\u5ba2\u6237\u89c4\u8303\u4e3a\u51c6\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"
\u771f\u7a7a\u4e0a\u4e0d\u53bb\uff0c\u4e5d\u6210\u4e0d\u662f\u6f0f\uff0c\u662f\u51fa\u6c14\u3002\u8868\u9762\u6709\u4e24\u5904\u5728\u653e\u6c14\uff1a\u6c34\u548c\u85cf\u5728\u635f\u4f24\u5c42\u91cc\u7684\u6c22\u3002\u524d\u8005\u9760\u70d8\u70e4\u548c\u62bd\u6c14\u65f6\u95f4\uff0c\u540e\u8005\u9760\u6e05\u6d17\u5de5\u827a\uff0c\u4e24\u8005\u4e0d\u80fd\u4e92\u76f8\u66ff\u4ee3\u3002<\/p>\n","protected":false},"author":1,"featured_media":121,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[6],"tags":[26,24,25],"class_list":["post-97","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-clean-particle","tag-26","tag-24","tag-25"],"_links":{"self":[{"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/posts\/97","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/comments?post=97"}],"version-history":[{"count":3,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/posts\/97\/revisions"}],"predecessor-version":[{"id":152,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/posts\/97\/revisions\/152"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/media\/121"}],"wp:attachment":[{"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/media?parent=97"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/categories?post=97"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/tags?post=97"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}