{"id":248,"date":"2026-11-06T19:03:42","date_gmt":"2026-11-06T11:03:42","guid":{"rendered":"https:\/\/panovacuum.cn\/blog\/atomic-layer-deposition-chamber-leak-cleanliness-risk-zh-cn\/"},"modified":"2026-11-06T19:03:42","modified_gmt":"2026-11-06T11:03:42","slug":"atomic-layer-deposition-chamber-leak-cleanliness-risk-zh-cn","status":"publish","type":"post","link":"https:\/\/panovacuum.cn\/blog\/atomic-layer-deposition-chamber-leak-cleanliness-risk-zh-cn\/","title":{"rendered":"\u539f\u5b50\u5c42\u6c89\u79ef\u8154\u4f53\u5982\u4f55\u964d\u4f4e\u771f\u7a7a\u6cc4\u6f0f\u4e0e\u6d01\u51c0\u5ea6\u98ce\u9669"},"content":{"rendered":"\u539f\u5b50\u5c42\u6c89\u79ef\u8154\u4f53\u662f\u4e00\u7c7b\u57281\u00d710\u207b\u2074 Pa\u4ee5\u4e0b\u5de5\u4f5c\u3001\u5e76\u8981\u6c42\u6781\u4f4e\u653e\u6c14\u7387\u4e0e\u524d\u9a71\u4f53\u5747\u5300\u5206\u5e03\u7684\u771f\u7a7a\u8bbe\u5907\u3002\u964d\u4f4e\u771f\u7a7a\u6cc4\u6f0f\u4e0e\u6d01\u51c0\u5ea6\u98ce\u9669\u7684\u5173\u952e\uff0c\u4e0d\u5728\u6cf5\uff0c\u800c\u5728\u710a\u7f1d\u3001\u5bc6\u5c01\u9762\u4e0e\u88c5\u914d\u73af\u5883\u7684\u5339\u914d\u3002\u5e15\u8bfa\u771f\u7a7a\u628a\u8fd9\u4e09\u5904\u4f5c\u4e3a\u8bbe\u8ba1\u4e0e\u9a8c\u6536\u7684\u7b2c\u4e00\u9053\u5173\u53e3\u3002\n\n<h2>\u4e3a\u4ec0\u4e48\u539f\u5b50\u5c42\u6c89\u79ef\u8154\u4f53\u5bf9\u6cc4\u6f0f\u66f4\u654f\u611f<\/h2>\n\u539f\u5b50\u5c42\u6c89\u79ef\u662f\u9010\u5c42\u81ea\u9650\u5236\u53cd\u5e94\uff0c\u5355\u6b21\u5faa\u73af\u53ea\u6c89\u79ef\u7ea60.1 nm\u3002\u56e0\u6b64\u4efb\u4f55\u5fae\u5c0f\u6f0f\u7387\u90fd\u4f1a\u6301\u7eed\u6c61\u67d3\u524d\u9a71\u4f53\u6c14\u6c1b\uff0c\u800c\u4e0d\u662f\u53ea\u5f71\u54cd\u672c\u5e95\u538b\u529b\u3002\u6309<a href=\"https:\/\/www.iso.org\/standard\/68190.html\">ISO 20485<\/a>\u7684\u793a\u8e2a\u6c14\u4f53\u65b9\u6cd5\uff0c\u6f0f\u7387\u5fc5\u987b\u4e0e\u6d4b\u8bd5\u65b9\u6cd5\u7ed1\u5b9a\u8868\u8ff0\uff0c\u4e0d\u80fd\u53ea\u5199\u4e00\u4e2a\u6570\u5b57\u3002\n\n<h3>\u5de5\u827a\u6c14\u6c1b\u7a97\u53e3\u7a84<\/h3>\n\u524d\u9a71\u4f53\u4e0e\u5439\u626b\u6c14\u7684\u5207\u6362\u5728\u6beb\u79d2\u7ea7\u5b8c\u6210\u3002\u8154\u4f53\u5185\u6b8b\u7559\u7a7a\u6c14\u4f1a\u76f4\u63a5\u751f\u6210\u9897\u7c92\u6216\u5316\u5b66\u6c14\u76f8\u526f\u4ea7\u7269\u3002\u6d01\u51c0\u5ea6\u98ce\u9669\u4e0e\u6cc4\u6f0f\u98ce\u9669\u5f80\u5f80\u540c\u6e90\uff1a\u90fd\u6765\u81ea\u5bc6\u5c01\u754c\u9762\u548c\u6b7b\u89d2\u3002\n\n<h3>\u6c34\u6c7d\u662f\u6700\u96be\u6e05\u9664\u7684\u6c61\u67d3\u7269<\/h3>\n\u6309CERN\u52a0\u901f\u5668\u5b66\u6821\u7684\u771f\u7a7a\u8bb2\u4e49\uff0c\u4e0d\u9508\u94a2\u8868\u9762\u6c34\u6c7d\u653e\u6c14\u8fd1\u4f3c\u968f\u62bd\u6c14\u65f6\u95f4\u63091\/t\u8870\u51cf\u3002\u62bd\u6c14\u65f6\u95f4\u5ef6\u957f\u5341\u500d\uff0c\u653e\u6c14\u7387\u548c\u538b\u529b\u5404\u964d\u4e00\u4e2a\u91cf\u7ea7\u3002\u8fd9\u89e3\u91ca\u4e86\u4e3a\u4ec0\u4e48\u6e05\u6d17\u540e\u7684\u8154\u4f53\u5fc5\u987b\u7acb\u5373\u62bd\u771f\u7a7a\u3002\u8154\u4f53\u655e\u53e3\u653e\u7f6e\u6570\u5c0f\u65f6\uff0c\u8868\u9762\u91cd\u65b0\u5438\u9644\u6c34\u6c7d\uff0c\u9a8c\u6536\u6570\u636e\u5c31\u4f1a\u5931\u771f\u3002\n\n<h2>\u6750\u6599\u4e0e\u7ed3\u6784\uff1a\u628a\u6cc4\u6f0f\u6e90\u5728\u56fe\u7eb8\u9636\u6bb5\u6d88\u9664<\/h2>\n\u5728\u56fe\u7eb8\u9636\u6bb5\u6d88\u9664\u6cc4\u6f0f\u6e90\uff0c\u6bd4\u5728\u68c0\u6f0f\u53f0\u4e0a\u6392\u67e5\u4fbf\u5b9c\u5f97\u591a\u3002\u5bf9\u539f\u5b50\u5c42\u6c89\u79ef\u8154\u4f53\uff0c\u4f18\u5148\u9009\u62e9\u771f\u7a7a\u4fa7\u5168\u710a\u63a5316L\u7ed3\u6784\u4e0e\u65e0\u76f2\u5b54\u8bbe\u8ba1\u3002GB\/T 6071-2003\uff08\u5bf9\u5e94<a href=\"https:\/\/www.iso.org\/standard\/87685.html\">ISO 3669<\/a>\uff09\u89c4\u5b9a\u7684CF\u5200\u53e3\u6cd5\u5170\uff0c\u7528\u65e0\u6c27\u94dc\u57ab\u5708\uff0c\u53ef\u70d8\u70e4\u81f3\u7ea6450 \u00b0C\uff0c\u9002\u5408\u8d85\u9ad8\u771f\u7a7a\u6bb5\u3002KF\u5361\u7b8d\uff08ISO 2861\uff09\u53ea\u5e94\u7528\u4e8e\u7c97\u771f\u7a7a\u4e0e\u6c34\u8def\u3002\n\n<h3>\u4f18\u5148\u5168\u710a\u63a5\uff0c\u5c11\u7528\u6cd5\u5170<\/h3>\n\u5355\u6676\u5706ALD\u8154\u4f53\u5185\u90e8\u901a\u5e38\u9700\u8981\u52a0\u70ed\u81f3150\u2013250 \u00b0C\u3002\u5168\u710a\u63a5\u7ed3\u6784\u907f\u514d\u4e86\u5927\u91cf\u5f39\u6027\u4f53\u5bc6\u5c01\u5708\u3002\u6bcf\u51cf\u5c11\u4e00\u5904O\u5f62\u5708\u69fd\uff0c\u5c31\u5c11\u4e00\u5904\u865a\u62df\u6cc4\u6f0f\u9690\u60a3\u3002\n\n<h3>\u8868\u9762\u5904\u7406\u8981\u5199\u5728\u56fe\u7eb8\u4e0a<\/h3>\n\u5e38\u89c1\u534a\u5bfc\u4f53\u8d85\u9ad8\u771f\u7a7a\u89c4\u683c\u4e3a316L\u7535\u89e3\u629b\u5149\u3001\u6e7f\u8868\u9762Ra \u2264 0.4 \u03bcm\uff0c\u5e76\u6309<a href=\"https:\/\/www.iso.org\/standard\/80209.html\">EN ISO 5817<\/a>\u7684B\u7ea7\u9a8c\u6536\u710a\u7f1d\u3002\u56fe\u7eb8\u53ea\u5199\u201c\u629b\u5149\u5904\u7406\u201d\uff0c\u52a0\u5de5\u65b9\u5f80\u5f80\u6309\u5916\u89c2\u6807\u51c6\u4ea4\u4ed8\u3002\u8fd9\u662f\u56fd\u5185\u9879\u76ee\u6700\u5e38\u89c1\u7684\u8fd4\u5de5\u539f\u56e0\u3002\n\n\u5e15\u8bfa\u771f\u7a7a\u6280\u672f\u56e2\u961f\u901a\u5e38\u4f1a\u5148\u6838\u5bf9\u4e09\u5904\uff1a\u5bc6\u5c01\u9762\u7c97\u7cd9\u5ea6\u6807\u6ce8\u3001\u710a\u7f1d\u5761\u53e3\u56fe\u4e0e\u6709\u65e0\u53cc\u91cd\u5bc6\u5c01\u69fd\u7684\u76f2\u8154\u3002\u7b2c2\u9879\u7f3a\u5931\uff0c\u710a\u63a5\u53d8\u5f62\u4f1a\u76f4\u63a5\u5403\u6389\u6cd5\u5170\u7aef\u9762\u5e73\u884c\u5ea6\u3002\n\n\n<figure class=\"wp-block-image size-large\"><img width=\"1200\" height=\"675\"  decoding=\"async\" src=\"https:\/\/panovacuum.cn\/blog\/wp-content\/uploads\/2026\/11\/ltu-equipment-vacuum-sputtering-flange-assembly-fabrication-20261025-019-1719-1.webp\" alt=\"\u771f\u7a7a\u6cd5\u5170\u7ec4\u4ef6\" loading=\"lazy\" \/><\/figure>\n<h2>\u710a\u63a5\u4e0e\u68c0\u9a8c\uff1a\u4e03\u9053\u5de5\u5e8f\u5982\u4f55\u5361\u4f4f\u6f0f\u70b9<\/h2>\n\u9a8c\u6536\u901a\u5e38\u628a\u5c3a\u5bf8\u3001\u710a\u7f1d\u8d28\u91cf\u3001\u6c26\u68c0\u4e0e\u6d01\u51c0\u5ea6\u6587\u4ef6\u7ed1\u5728\u4e00\u8d77\u3002\u710a\u7f1d\u6309EN ISO 5817\u8bc4\u7ea7\uff0c\u5fc5\u8981\u65f6\u6309<a href=\"https:\/\/www.iso.org\/standard\/75696.html\">ISO 3452-1<\/a>\u505a\u6e17\u900f\u68c0\u6d4b\uff0c\u518d\u8fdb\u5165\u6c26\u8d28\u8c31\u68c0\u6f0f\u3002\u5e38\u719f\u5de5\u5382\u914d\u7f6e30,000W\u6fc0\u5149\u4e0b\u6599\u3001400T\u00b76.2m\u6570\u63a7\u6298\u5f2f\u3001TIG\u4e0e\u81ea\u52a8\u5316\u710a\u63a5\uff0c\u6c26\u8d28\u8c31\u68c0\u6f0f\u53ef\u505a\u52301\u00d710\u207b\u2079 Pa\u00b7m\u00b3\/s\u91cf\u7ea7\u3002\n\n<h3>\u5148\u6e17\u900f\uff0c\u540e\u68c0\u6f0f<\/h3>\n\u987a\u5e8f\u98a0\u5012\u4f1a\u5e26\u6765\u8bef\u5224\u3002\u710a\u7f1d\u672a\u6e05\u7406\u5e72\u51c0\u7684\u6e17\u900f\u6db2\u6b8b\u7559\u5728\u5fae\u9699\u4e2d\uff0c\u4f1a\u5728\u6c26\u68c0\u65f6\u8868\u73b0\u4e3a\u7f13\u6162\u8870\u51cf\u7684\u201c\u5047\u6f0f\u201d\u3002\u6211\u4eec\u8981\u6c42\u6e17\u900f\u68c0\u6d4b\u5408\u683c\u5e76\u6e05\u6d17\u5e72\u71e5\u540e\uff0c\u624d\u8fdb\u5165\u68c0\u6f0f\u5de5\u4f4d\u3002\n\n<h3>\u538b\u529b\u4e0a\u5347\u6cd5\u4e0e\u6c26\u68c0\u4e0d\u80fd\u6df7\u7528<\/h3>\nGB\/T 32218-2015\u89c4\u5b9a\u538b\u529b\u4e0a\u5347\u6cd5\u7684\u6709\u6548\u4e0b\u9650\u7ea6\u4e3a1\u00d710\u207b\u2075 Pa\u00b7m\u00b3\/s\uff0c\u4e14\u5fc5\u987b\u505a\u6e29\u5ea6\u4fee\u6b63\u3002\u6c26\u8d28\u8c31\u6cd5\uff08GB\/T 36176-2018\uff09\u7075\u654f\u5ea6\u9ad8\u5f97\u591a\u3002\u62a5\u544a\u5e94\u5199\u660e\u793a\u8e2a\u6c14\u4f53\u3001\u6821\u51c6\u6f0f\u5b54\u3001\u6700\u5c0f\u53ef\u68c0\u6f0f\u7387\u4e0e\u6d4b\u8bd5\u538b\u529b\u3002\n\n<h2>\u6d01\u51c0\u5ea6\u63a7\u5236\uff1a\u4ece\u88c5\u914d\u95f4\u5230\u5305\u88c5<\/h2>\n\u6d01\u51c0\u5ea6\u4e0d\u662f\u4e00\u6b21\u6e05\u6d17\uff0c\u800c\u662f\u4e00\u6761\u4ece\u4e0b\u6599\u3001\u710a\u63a5\u3001\u629b\u5149\u3001\u949d\u5316\u5230\u6d01\u51c0\u88c5\u914d\u7684\u94fe\u8def\u3002\u4efb\u4f55\u4e00\u73af\u88f8\u9732\u90fd\u4f1a\u524d\u529f\u5c3d\u5f03\u3002\u949d\u5316\u540e\u4e0d\u505a\u6709\u6548\u4fdd\u62a4\uff0c\u4e0d\u9508\u94a2\u8868\u9762\u4f1a\u5728\u6570\u5c0f\u65f6\u5185\u5f00\u59cb\u91cd\u65b0\u5438\u9644\u6c61\u67d3\u7269\u3002\u6d01\u51c0\u5ba4\u5206\u7ea7\u4e0e\u76f8\u5173\u6d01\u51c0\u5ea6\u8981\u6c42\u53ef\u53c2\u7167<a href=\"https:\/\/www.iso.org\/standard\/53394.html\">ISO 14644<\/a>\u7cfb\u5217\u6807\u51c6\u8868\u8ff0\u3002\n\n<h3>\u88c5\u914d\u73af\u5883\u4e0e\u5de5\u5e8f\u9694\u79bb<\/h3>\n\u6d01\u51c0\u88c5\u914d\u533a\u57df\u5e94\u4e0e\u4eba\u6d41\u7269\u6d41\u5206\u79bb\uff0c\u5de5\u88c5\u4e0e\u624b\u5957\u9700\u5b9a\u671f\u66f4\u6362\u3002\u78b3\u94a2\u5de5\u5177\u63a5\u89e6\u4e0d\u9508\u94a2\u8868\u9762\u4f1a\u5f15\u5165\u6e38\u79bb\u94c1\u3002\u540e\u7eed\u9178\u6d17\u4e5f\u96be\u5b8c\u5168\u53bb\u9664\u3002\n\n<h3>\u51fa\u5382\u524d\u4e03\u9053\u68c0\u9a8c<\/h3>\n\u5c3a\u5bf8\u3001\u710a\u7f1d\u3001\u6e17\u900f\u3001\u6c26\u68c0\u3001\u7c97\u7cd9\u5ea6\u3001\u6d01\u51c0\u5ea6\u4e0e\u5305\u88c5\u9632\u62a4\uff0c\u6784\u6210\u5e38\u719f\u5de5\u5382\u76847\u9053\u51fa\u5382\u68c0\u9a8c\u5de5\u5e8f\u3002\u68c0\u9a8c\u8bb0\u5f55\u968f\u8d27\u4ea4\u4ed8\u3002\u8fd9\u6bd4\u53e3\u5934\u627f\u8bfa\u66f4\u80fd\u652f\u6491\u5ba2\u6237\u7684\u8fdb\u573a\u9a8c\u6536\u3002\n\n\n<figure class=\"wp-block-image size-large\"><img width=\"2560\" height=\"1920\"  decoding=\"async\" src=\"https:\/\/panovacuum.cn\/blog\/wp-content\/uploads\/2026\/11\/ltu-equipment-vacuum-vacuum-machinery-workshop-20261030-062-e509-1-scaled.webp\" alt=\"\u673a\u52a0\u5de5\u8f66\u95f4\" loading=\"lazy\" \/><\/figure>\n<h2>\u70ed\u771f\u7a7a\u8154\u4f53\u7684\u65c1\u8bc1\uff1a\u70d8\u70e4\u80fd\u53bb\u6c34\uff0c\u53bb\u4e0d\u6389\u6c22<\/h2>\n\u70ed\u771f\u7a7a\u8154\u4f53\u4e0e\u539f\u5b50\u5c42\u6c89\u79ef\u8154\u4f53\u7684\u653e\u6c14\u673a\u7406\u76f8\u901a\u3002250 \u00b0C\u00d724 h\u70d8\u70e4\u80fd\u628a\u6c34\u6c7d\u653e\u6c14\u964d\u5230\u7ea61\u00d710\u207b\u00b9\u2074 mbar\u00b7L\/(s\u00b7cm\u00b2)\uff0c\u4f46\u6c22\u4ec5\u4ece7\u00d710\u207b\u00b9\u00b2\u964d\u52305\u00d710\u207b\u00b9\u00b3\u3002\u56e0\u6b64\u94a2\u5236\u8154\u4f53\u9700\u8981200 \u00b0C\u4ee5\u4e0a\u70d8\u70e4\u6216\u53cd\u590d\u70d8\u70e4\u5faa\u73af\uff0c\u800c\u94dd\u3001\u94dc\u8154\u4f53150\u2013200 \u00b0C\u5373\u53ef\u3002\u6750\u6599\u653e\u6c14\u4e0e\u8868\u9762\u5904\u7406\u7684\u901a\u7528\u8868\u8ff0\u53ef\u5bf9\u7167<a href=\"https:\/\/www.astm.org\/\">ASTM International<\/a>\u7684\u76f8\u5173\u771f\u7a7a\u4e0e\u8868\u9762\u6e05\u6d01\u6807\u51c6\u3002\n\n<h2>\u5e38\u89c1\u65b9\u6848\u5bf9\u6bd4<\/h2>\n\u4e0b\u8868\u5217\u51fa\u56fd\u5185\u91c7\u8d2d\u65f6\u6700\u5e38\u6bd4\u8f83\u7684\u51e0\u79cd\u914d\u7f6e\u3002\u9009\u578b\u5e94\u7ed3\u5408\u5de5\u827a\u6e29\u5ea6\u3001\u5faa\u73af\u8282\u62cd\u4e0e\u9884\u7b97\uff0c\u800c\u975e\u5355\u770b\u6781\u9650\u538b\u529b\u3002\u6cd5\u5170\u4e0e\u5bc6\u5c01\u4ef6\u5c3a\u5bf8\u53ef\u5bf9\u7167<a href=\"https:\/\/www.iso.org\/standards.html\">ISO 2861<\/a>\u7cfb\u5217\u3002\n\n<table>\n<tr><th>\u65b9\u6848<\/th><th>\u9002\u7528\u771f\u7a7a\u6bb5<\/th><th>\u5bc6\u5c01\u4e0e\u70d8\u70e4<\/th><th>\u4e3b\u8981\u98ce\u9669<\/th><\/tr>\n<tr><td>\u5168\u710a\u63a5316L\u8154\u4f53+CF\u6cd5\u5170<\/td><td>\u9ad8\u771f\u7a7a\u81f3\u8d85\u9ad8\u771f\u7a7a<\/td><td>\u65e0\u6c27\u94dc\u57ab\u5708\uff0c\u53ef\u70d8\u70e4\u7ea6450 \u00b0C<\/td><td>\u710a\u63a5\u53d8\u5f62\uff0c\u7aef\u9762\u5e73\u884c\u5ea6\u9700\u63a7\u5236<\/td><\/tr>\n<tr><td>316L\u8154\u4f53+ISO-K\u6cd5\u5170<\/td><td>\u4e2d\u771f\u7a7a<\/td><td>\u91d1\u5c5e\u6216\u5f39\u6027\u4f53\u5bc6\u5c01\uff0c\u70d8\u70e4\u6e29\u5ea6\u53d7\u9650<\/td><td>\u5f39\u6027\u4f53\u653e\u6c14\uff0c\u957f\u671f\u4f7f\u7528\u8001\u5316<\/td><\/tr>\n<tr><td>304L\u8154\u4f53+KF\u5361\u7b8d<\/td><td>\u7c97\u771f\u7a7a<\/td><td>\u5f39\u6027\u4f53O\u5f62\u5708\uff0c\u4e00\u822c\u4e0d\u4f5c\u9ad8\u6e29\u70d8\u70e4<\/td><td>\u4e0d\u9002\u7528\u4e8e\u524d\u9a71\u4f53\u6d01\u51c0\u8981\u6c42<\/td><\/tr>\n<tr><td>\u94dd\u8154\u4f53\uff08\u70ed\u771f\u7a7a\u7c7b\uff09<\/td><td>\u9ad8\u771f\u7a7a<\/td><td>150\u2013200 \u00b0C\u70d8\u70e4<\/td><td>\u8868\u9762\u786c\u5ea6\u4f4e\uff0c\u88c5\u914d\u6613\u5212\u4f24<\/td><\/tr>\n<tr><td>\u5e26\u53cc\u91cdO\u5f62\u5708\u69fd\u7ed3\u6784<\/td><td>\u4e2d\u9ad8\u771f\u7a7a<\/td><td>\u53ef\u5728\u7ebf\u66f4\u6362\u5bc6\u5c01<\/td><td>\u69fd\u95f4\u5f62\u6210\u865a\u62df\u6cc4\u6f0f\uff0c\u68c0\u6f0f\u9700\u5185\u90e8\u5439\u626b<\/td><\/tr>\n<\/table>\n\n\n<figure class=\"wp-block-image size-large\"><img width=\"2560\" height=\"1920\"  decoding=\"async\" src=\"https:\/\/panovacuum.cn\/blog\/wp-content\/uploads\/2026\/11\/ltu-equipment-vacuum-vacuum-machinery-workshop-20261030-053-3db8-scaled.webp\" alt=\"\u673a\u52a0\u5de5\u8f66\u95f4\" loading=\"lazy\" \/><\/figure>\n<h2>\u91c7\u8d2d\u65f6\u600e\u4e48\u5ba1\u4e00\u4efd\u68c0\u6f0f\u62a5\u544a<\/h2>\n\u5408\u683c\u7684\u68c0\u6f0f\u62a5\u544a\u5e94\u80fd\u590d\u73b0\uff1a\u7528\u4e86\u4ec0\u4e48\u793a\u8e2a\u6c14\u4f53\u3001\u6821\u51c6\u6f0f\u5b54\u7684\u91cf\u503c\u3001\u6700\u5c0f\u53ef\u68c0\u6f0f\u7387\u4e0e\u6d4b\u8bd5\u538b\u529b\u3002\u65b9\u6cd5\u9009\u62e9\u6309GB\/T 32293-2015\u3002\u53ea\u5199\u201c\u68c0\u6f0f\u5408\u683c\u201d\u56db\u4e2a\u5b57\uff0c\u65e0\u6cd5\u4f5c\u4e3a\u9a8c\u6536\u4f9d\u636e\u3002\u771f\u7a7a\u6cf5\u6027\u80fd\u4e5f\u5e94\u5bf9\u7167<a href=\"https:\/\/www.iso.org\/standard\/59991.html\">ISO 21360-1<\/a>\u7cfb\u5217\u8868\u8ff0\uff0c\u7528\u9519\u57fa\u51c6\u7684\u6837\u672c\u5728\u56fd\u5185\u5e76\u4e0d\u5c11\u89c1\u3002\n\n<h3>\u865a\u62df\u6cc4\u6f0f\u600e\u4e48\u8ba4<\/h3>\n\u538b\u529b\u4e0a\u5347\u66f2\u7ebf\u7f13\u6162\u8870\u51cf\u800c\u4e0d\u6536\u655b\uff0c\u591a\u534a\u662f\u76f2\u5b54\u6216\u53cc\u5bc6\u5c01\u69fd\u7684\u6ede\u7559\u4f53\u79ef\uff0c\u800c\u4e0d\u662f\u771f\u6f0f\u3002\u6b64\u65f6\u5728\u5916\u58c1\u55b7\u6c26\u5f80\u5f80\u627e\u4e0d\u5230\u3002\u9700\u8981\u5185\u90e8\u5145\u6c26\u6216\u9694\u79bb\u8be5\u8154\u4f53\u540e\u590d\u6d4b\u3002\n\n<h3>\u5fc5\u987b\u8ba9\u4e70\u65b9\u9a8c\u8bc1\u7684\u6570\u636e<\/h3>\n\u6781\u9650\u538b\u529b\u3001\u62bd\u6c14\u65f6\u95f4\u4e0e\u9897\u7c92\u6dfb\u52a0\u91cf\uff0c\u53d6\u51b3\u4e8e\u6cf5\u7ec4\u914d\u7f6e\u3001\u7ba1\u8def\u6d41\u5bfc\u4e0e\u5ba2\u6237\u5de5\u827a\u3002\u8fd9\u4e9b\u4e0d\u80fd\u7528\u901a\u7528\u6837\u672c\u503c\u66ff\u4ee3\u3002\u6309ISO 21360-1\uff0c\u6709\u6548\u62bd\u901fSeff\u7531\u6cf5\u901f\u4e0e\u6d41\u5bfc\u5171\u540c\u51b3\u5b9a\uff0c\u5206\u5b50\u6d41\u4e0b\u7ba1\u8def\u6d41\u5bfc\u7ea6\u4e0e\u76f4\u5f84\u4e09\u6b21\u65b9\u6210\u6b63\u6bd4\u3001\u4e0e\u957f\u5ea6\u6210\u53cd\u6bd4\u3002\n\n<h2>\u4ece\u5e38\u719f\u5de5\u5382\u5230\u73b0\u573a\uff1a\u5de5\u7a0b\u534f\u540c\u7684\u4f5c\u7528<\/h2>\n\u8154\u4f53\u505a\u597d\u53ea\u662f\u5f00\u59cb\u3002\u6cd5\u5170\u6807\u51c6\u3001\u63a5\u53e3\u65b9\u4f4d\u4e0e\u6d01\u51c0\u5305\u88c5\u5e38\u4e0e\u6574\u673a\u4fa7\u4e0d\u4e00\u81f4\u3002\u5e15\u8bfa\u771f\u7a7a\u4ee5\u7edf\u4e00\u7684\u5546\u52a1\u63a5\u53e3\u5bf9\u63a5\u8ba4\u8bc1\u5408\u4f5c\u5de5\u5382\u7f51\u7edc\uff0c\u56fe\u7eb8\u9636\u6bb5\u505a\u9762\u5411\u5236\u9020\u7684\u53ef\u5236\u9020\u6027\u8bc4\u5ba1\uff0c\u9879\u76ee\u8fdb\u5ea6\u53ef\u67e5\u8be2\uff0c\u5e76\u53ef\u7b7e\u7f72\u4fdd\u5bc6\u534f\u8bae\u3002\u63a5\u53e3\u4e0e\u6cd5\u5170\u4e92\u6362\u6027\u53ef\u53c2\u7167<a href=\"https:\/\/www.iso.org\/standard\/87685.html\">ISO 3669<\/a>\u7684\u5200\u53e3\u6cd5\u5170\u89c4\u5b9a\u3002\n\n<h3>\u4e00\u4ef6\u8d77\u8ba2\u4e0e\u54cd\u5e94\u8282\u594f<\/h3>\n\u5e38\u719f\u5de5\u5382\u4ee5304L\/316L\u4e3a\u4e3b\uff0c\u5355\u4ef6\u53ef\u505a\u5230\u6570\u5428\u7ea7\uff0c\u4e00\u4ef6\u8d77\u8ba2\uff0c48\u5c0f\u65f6\u5185\u56de\u590d\u56fe\u7eb8\u8be2\u4ef7\u3002\u8fd9\u4e00\u8282\u594f\u5bf9\u7814\u53d1\u9636\u6bb5\u7684ALD\u5de5\u88c5\u5c24\u4e3a\u5b9e\u7528\u3002\n\n<h3>\u8ba4\u8bc1\u72b6\u6001\u5982\u5b9e\u8bf4\u660e<\/h3>\n\u8d28\u91cf\u4f53\u7cfb\u8ba4\u8bc1\u6309\u9879\u76ee\u63d0\u4f9b\u3002\u76f8\u5173\u534a\u5bfc\u4f53\u884c\u4e1a\u8ba4\u8bc1\u5904\u4e8e\u63a8\u8fdb\u4e2d\u3002\u4e70\u65b9\u5982\u9700<a href=\"https:\/\/www.semi.org\/\">SEMI<\/a>\u76f8\u5173\u7b26\u5408\u6027\u6587\u4ef6\uff0c\u8bf7\u5728\u8be2\u4ef7\u65f6\u660e\u786e\u5217\u51fa\u3002\n\n<h2>\u5e38\u89c1\u95ee\u9898<\/h2>\n\n<h3>\u539f\u5b50\u5c42\u6c89\u79ef\u8154\u4f53\u7684\u9a8c\u6536\u6f0f\u7387\u4e00\u822c\u5199\u591a\u5c11\uff1f<\/h3>\n\u884c\u4e1a\u5e38\u89c1\u5199\u6cd5\u662f\u6c26\u8d28\u8c31\u68c0\u6f0f\u22641\u00d710\u207b\u2079 Pa\u00b7m\u00b3\/s\u91cf\u7ea7\uff0c\u5e76\u6ce8\u660e\u6d4b\u8bd5\u65b9\u6cd5\u4e0e\u6821\u51c6\u6f0f\u5b54\u3002\u5177\u4f53\u9650\u503c\u5e94\u4ee5\u8d35\u53f8\u5de5\u827a\u89c4\u683c\u6216\u5ba2\u6237\u89c4\u8303\u4e3a\u51c6\u3002\u4ec5\u5199\u6570\u5b57\u800c\u4e0d\u5199\u65b9\u6cd5\uff0c\u62a5\u544a\u4e0d\u5177\u5907\u53ef\u6bd4\u6027\u3002\n\n<h3>\u80fd\u4e0d\u80fd\u7528304L\u66ff\u4ee3316L\u505aALD\u8154\u4f53\uff1f<\/h3>\n\u7c97\u771f\u7a7a\u6bb5\u53ef\u4ee5\uff0c\u524d\u9a71\u4f53\u63a5\u89e6\u7684\u771f\u7a7a\u4fa7\u4e00\u822c\u63a8\u8350316L\u5e76\u505a\u7535\u89e3\u629b\u5149\u3002304L\u5728\u8010\u8680\u6027\u4e0e\u8868\u9762\u4e00\u81f4\u6027\u4e0a\u4f59\u91cf\u66f4\u5c0f\u3002\u6700\u7ec8\u9009\u62e9\u5e94\u7531\u5de5\u827a\u6c14\u4f53\u4e0e\u6e05\u6d17\u65b9\u5f0f\u51b3\u5b9a\u3002\n\n<h3>\u56fe\u7eb8\u9700\u8981\u6807\u6ce8\u54ea\u4e9b\u5185\u5bb9\u624d\u4e0d\u4f1a\u88ab\u8fd4\u5de5\uff1f<\/h3>\n\u81f3\u5c11\u6807\u6ce8\u5bc6\u5c01\u9762\u7c97\u7cd9\u5ea6\u3001\u710a\u7f1d\u9a8c\u6536\u7b49\u7ea7\u4e0e\u5761\u53e3\u5f62\u5f0f\u3001\u6cd5\u5170\u6807\u51c6\u53f7\uff0c\u4ee5\u53ca\u662f\u5426\u5141\u8bb8\u76f2\u5b54\u3002\u7f3a\u5c11\u710a\u7f1d\u5761\u53e3\u4fe1\u606f\u662f\u6700\u5e38\u89c1\u7684\u8fd4\u5de5\u6765\u6e90\u3002\n\n<h3>\u5355\u4ef6\u975e\u6807\u8154\u4f53\u7684\u4ea4\u671f\u600e\u4e48\u4f30\uff1f<\/h3>\n\u4ea4\u671f\u53d6\u51b3\u4e8e\u710a\u63a5\u5de5\u4f5c\u91cf\u3001\u629b\u5149\u7b49\u7ea7\u4e0e\u68c0\u6f0f\u8f6e\u6b21\uff0c\u65e0\u6cd5\u8131\u79bb\u56fe\u7eb8\u7ed9\u51fa\u3002\u63d0\u4f9b\u4e09\u7ef4\u6a21\u578b\u4e0e\u63a5\u53e3\u6e05\u5355\u540e\uff0c48\u5c0f\u65f6\u5185\u53ef\u7ed9\u51fa\u62a5\u4ef7\u53e3\u5f84\u3002\u5207\u52ff\u6309\u6807\u51c6\u673a\u67dc\u7684\u4ea4\u671f\u63a8\u7b97\u975e\u6807\u4ef6\u3002\n\n<h3>\u80fd\u63d0\u4f9b\u54ea\u4e9b\u968f\u8d27\u6587\u4ef6\uff1f<\/h3>\n\u5e38\u89c4\u5305\u62ec\u6750\u8d28\u8bc1\u660e\u3001\u5c3a\u5bf8\u68c0\u9a8c\u8bb0\u5f55\u3001\u710a\u7f1d\u68c0\u6d4b\u8bb0\u5f55\u3001\u6c26\u68c0\u62a5\u544a\u4e0e\u6d01\u51c0\u5ea6\u8bf4\u660e\uff0c\u5177\u4f53\u6e05\u5355\u6309\u5408\u540c\u7ea6\u5b9a\u3002\u9700\u8981\u7b2c\u4e09\u65b9\u89c1\u8bc1\u68c0\u9a8c\u7684\uff0c\u8bf7\u5728\u8ba2\u5355\u524d\u63d0\u51fa\u3002\u76f8\u5173\u4ea7\u54c1\u80fd\u529b\u53ef\u5728<a href=\"https:\/\/panovacuum.cn\/zh\/products\/\" target=\"_blank\">\u5e15\u8bfa\u771f\u7a7a\u771f\u7a7a\u8154\u4f53\u4ea7\u54c1\u9875<\/a>\u67e5\u770b\u3002\n\n<h2>\u4e0b\u4e00\u6b65\uff1a\u628a\u56fe\u7eb8\u53d1\u8fc7\u6765<\/h2>\n\u6cc4\u6f0f\u4e0e\u6d01\u51c0\u5ea6\u98ce\u9669\uff0c\u516b\u6210\u5728\u56fe\u7eb8\u9636\u6bb5\u5c31\u5df2\u51b3\u5b9a\uff0c\u5269\u4e0b\u4e24\u6210\u9760\u68c0\u9a8c\u5de5\u5e8f\u515c\u4f4f\u3002\u8bf7\u628a\u8154\u4f53\u603b\u88c5\u56fe\u3001\u63a5\u53e3\u6e05\u5355\u4e0e\u5de5\u827a\u6761\u4ef6\uff08\u672c\u5e95\u538b\u529b\u3001\u70d8\u70e4\u6e29\u5ea6\u3001\u524d\u9a71\u4f53\u79cd\u7c7b\uff09\u4e00\u5e76\u53d1\u6765\u3002\u6211\u4eec\u636e\u6b64\u7ed9\u51fa\u68c0\u6f0f\u65b9\u6848\u4e0e\u68c0\u9a8c\u9879\u76ee\u5efa\u8bae\u3002\u9a8c\u6536\u6807\u51c6\u53f7\u53ef\u5bf9\u7167<a href=\"https:\/\/www.iso.org\/standards.html\">ISO \u6807\u51c6\u76ee\u5f55<\/a>\u786e\u8ba4\u7248\u672c\u3002\n\n\u9700\u8981\u5bf9\u5916\u62a5\u4ef7\u7684\u4e70\u5bb6\uff0c\u53ef\u540c\u65f6\u63d0\u4f9b\u8d35\u53f8\u7684\u9a8c\u6536\u6807\u51c6\u53f7\uff08\u5982EN ISO 5817\u7ea7\u522b\u3001ISO 20485\u65b9\u6cd5\uff09\u4e0e\u6d01\u51c0\u5ea6\u8981\u6c42\u3002\u8fd9\u4e9b\u4fe1\u606f\u8d8a\u660e\u786e\uff0c\u62a5\u4ef7\u53e3\u5f84\u8d8a\u53ef\u6bd4\u3002\n\n<div class=\"ltu-related-products\"><h3>\u76f8\u5173\u4ea7\u54c1\u9875\u9762<\/h3><ul><li><a href=\"https:\/\/panovacuum.cn\/zh\/products\/\" target=\"_blank\">\u539f\u5b50\u5c42\u6c89\u79ef\u8154\u4f53 \u89e3\u51b3\u65b9\u6848\u9875\u9762<\/a><\/li><\/ul><\/div><div class=\"ltu-final-contact\"><p><strong>\u8bbe\u8ba1\u3001\u76d1\u9020\u5e76\u51fa\u53e3\u5de5\u7a0b\u94a2\u7ed3\u6784\u3001CNC \u90e8\u4ef6\u53ca\u5404\u7c7b\u5b9a\u5236\u5236\u9020\u4ea7\u54c1\u2014\u2014\u7531\u901a\u8fc7 EN1090\/ISO 3834-2 \u8ba4\u8bc1\u7684\u5408\u4f5c\u4f19\u4f34\u5de5\u5382\u5236\u9020\u3002 \u7acb\u5373\u8054\u7cfb\u6211\u4eec\u7684\u5de5\u7a0b\u56e2\u961f\uff0c\u83b7\u53d6\u514d\u8d39 DFM \u8bc4\u5ba1\u4e0e\u62a5\u4ef7\u3002<\/strong><\/p><p>\ud83d\udce7 \u90ae\u7bb1: support@panovacuum.cn<br>\ud83d\udcde \u7535\u8bdd\/WhatsApp: +1 (307) 533 3212<br>\ud83c\udf10 \u7f51\u7ad9: <a href=\"https:\/\/panovacuum.cn\" target=\"_blank\">https:\/\/panovacuum.cn<\/a><\/p><\/div>","protected":false},"excerpt":{"rendered":"<p>\u539f\u5b50\u5c42\u6c89\u79ef\u8154\u4f53\u5bf9\u771f\u7a7a\u6cc4\u6f0f\u548c\u6d01\u51c0\u5ea6\u6781\u4e3a\u654f\u611f\u3002\u672c\u6587\u4ece\u6750\u6599\u3001\u710a\u63a5\u3001\u68c0\u6f0f\u4e0e\u51fa\u5382\u68c0\u9a8c\u56db\u4e2a\u73af\u8282\uff0c\u8bf4\u660e\u539f\u5b50\u5c42\u6c89\u79ef\u8154\u4f53\u5982\u4f55\u964d\u4f4e\u6cc4\u6f0f\u4e0e\u6c61\u67d3\u98ce\u9669\u3002<\/p>\n","protected":false},"author":1,"featured_media":240,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-248","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-2"],"_links":{"self":[{"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/posts\/248","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/comments?post=248"}],"version-history":[{"count":0,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/posts\/248\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/media\/240"}],"wp:attachment":[{"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/media?parent=248"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/categories?post=248"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/panovacuum.cn\/blog\/wp-json\/wp\/v2\/tags?post=248"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}